InP optical constants between 0.75 and 5.0 eV determined by variable-angle spectroscopic ellipsometry
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Abstract
Using variable-angle spectroscopic ellipsometry (VASE) InP optical constants for photon energies have been determined in the range from 0.75 to 5.0 eV, which includes the fundamental gap at 1.35 eV. Above 1.5 eV the results are consistent with previously measured pseudovalues from an oxide-stripped sample when a very thin residual overlayer is accounted for. They are also shown to be compatible with previously published prism measurements of refractive index below the band gap. Real and imaginary parts of the dielectric function are shown to be Kramers-Kronig (KK) self-consistent above the gap, and the KK analysis was used to extend the dielectric function below the measurement range to 0.5 eV. The assumptions underlying biased fitting of VASE data and the importance of variable-angle measurements were investigated. The detection and significance of systematic errors for general VASE data analysis were also investigated, especially with regard to fit parameter confidence limits. © 1995 American Institute of Physics.
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<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">InP optical constants between 0.75 and 5.0 eV determined by variable-angle spectroscopic ellipsometry</title><author><name sortKey="Herzinger, C M" uniqKey="Herzinger C">C. M. Herzinger</name><affiliation wicri:level="2"><inist:fA14 i1="01"><s1>Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, Nebraska 68588-0511</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Nebraska</region></placeName><wicri:cityArea>Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln</wicri:cityArea></affiliation></author><author><name sortKey="Snyder, P G" uniqKey="Snyder P">P. G. Snyder</name><affiliation wicri:level="2"><inist:fA14 i1="01"><s1>Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, Nebraska 68588-0511</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Nebraska</region></placeName><wicri:cityArea>Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln</wicri:cityArea></affiliation></author><author><name sortKey="Johs, B" uniqKey="Johs B">B. Johs</name><affiliation wicri:level="2"><inist:fA14 i1="02"><s1>J. A. Woollam Co., Inc., Lincoln, Nebraska 68588</s1><sZ>3 aut.</sZ><sZ>4 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Nebraska</region></placeName><wicri:cityArea>J. A. Woollam Co., Inc., Lincoln</wicri:cityArea></affiliation></author><author><name sortKey="Woollam, J A" uniqKey="Woollam J">J. A. Woollam</name><affiliation wicri:level="2"><inist:fA14 i1="02"><s1>J. A. Woollam Co., Inc., Lincoln, Nebraska 68588</s1><sZ>3 aut.</sZ><sZ>4 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Nebraska</region></placeName><wicri:cityArea>J. A. Woollam Co., Inc., Lincoln</wicri:cityArea></affiliation></author></titleStmt><publicationStmt><idno type="inist">95-0122554</idno><date when="1995-02-15">1995-02-15</date><idno type="stanalyst">PASCAL 95-0122554 AIP</idno><idno type="RBID">Pascal:95-0122554</idno><idno type="wicri:Area/Main/Corpus">01D232</idno><idno type="wicri:Area/Main/Repository">01BC81</idno></publicationStmt><seriesStmt><idno type="ISSN">0021-8979</idno><title level="j" type="abbreviated">J. Appl. Phys.</title><title level="j" type="main">Journal of Applied Physics</title></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Data analysis</term><term>Ellipsometry</term><term>Energy gap</term><term>Epitaxial layers</term><term>Experimental study</term><term>Indium phosphides</term><term>Kramers-Kronig correlation</term><term>Optical constants</term><term>Oxides</term><term>Refractive index</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>Etude expérimentale</term><term>7820</term><term>0760F</term><term>Indium phosphure</term><term>Constante optique</term><term>Ellipsométrie</term><term>Bande interdite</term><term>Indice réfraction</term><term>Corrélation Kramers Kronig</term><term>Oxyde</term><term>Analyse donnée</term><term>Couche épitaxique</term></keywords><keywords scheme="Wicri" type="concept" xml:lang="fr"><term>Oxyde</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Using variable-angle spectroscopic ellipsometry (VASE) InP optical constants for photon energies have been determined in the range from 0.75 to 5.0 eV, which includes the fundamental gap at 1.35 eV. Above 1.5 eV the results are consistent with previously measured pseudovalues from an oxide-stripped sample when a very thin residual overlayer is accounted for. They are also shown to be compatible with previously published prism measurements of refractive index below the band gap. Real and imaginary parts of the dielectric function are shown to be Kramers-Kronig (KK) self-consistent above the gap, and the KK analysis was used to extend the dielectric function below the measurement range to 0.5 eV. The assumptions underlying biased fitting of VASE data and the importance of variable-angle measurements were investigated. The detection and significance of systematic errors for general VASE data analysis were also investigated, especially with regard to fit parameter confidence limits. © 1995 American Institute of Physics.</div></front></TEI><inist><standard h6="B"><pA><fA01 i1="01" i2="1"><s0>0021-8979</s0></fA01><fA02 i1="01"><s0>JAPIAU</s0></fA02><fA03 i2="1"><s0>J. Appl. Phys.</s0></fA03><fA05><s2>77</s2></fA05><fA06><s2>4</s2></fA06><fA08 i1="01" i2="1" l="ENG"><s1>InP optical constants between 0.75 and 5.0 eV determined by variable-angle spectroscopic ellipsometry</s1></fA08><fA11 i1="01" i2="1"><s1>HERZINGER (C. M.)</s1></fA11><fA11 i1="02" i2="1"><s1>SNYDER (P. G.)</s1></fA11><fA11 i1="03" i2="1"><s1>JOHS (B.)</s1></fA11><fA11 i1="04" i2="1"><s1>WOOLLAM (J. A.)</s1></fA11><fA14 i1="01"><s1>Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, Nebraska 68588-0511</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ></fA14><fA14 i1="02"><s1>J. A. Woollam Co., Inc., Lincoln, Nebraska 68588</s1><sZ>3 aut.</sZ><sZ>4 aut.</sZ></fA14><fA20><s1>1715-1724</s1></fA20><fA21><s1>1995-02-15</s1></fA21><fA23 i1="01"><s0>ENG</s0></fA23><fA43 i1="01"><s1>INIST</s1><s2>126</s2></fA43><fA44><s0>8100</s0><s1>© AIP</s1></fA44><fA47 i1="01" i2="1"><s0>95-0122554</s0></fA47><fA60><s1>P</s1></fA60><fA61><s0>A</s0></fA61><fA64 i1="01" i2="1"><s0>Journal of Applied Physics</s0></fA64><fA66 i1="01"><s0>USA</s0></fA66><fC01 i1="01" l="ENG"><s0>Using variable-angle spectroscopic ellipsometry (VASE) InP optical constants for photon energies have been determined in the range from 0.75 to 5.0 eV, which includes the fundamental gap at 1.35 eV. Above 1.5 eV the results are consistent with previously measured pseudovalues from an oxide-stripped sample when a very thin residual overlayer is accounted for. They are also shown to be compatible with previously published prism measurements of refractive index below the band gap. Real and imaginary parts of the dielectric function are shown to be Kramers-Kronig (KK) self-consistent above the gap, and the KK analysis was used to extend the dielectric function below the measurement range to 0.5 eV. The assumptions underlying biased fitting of VASE data and the importance of variable-angle measurements were investigated. 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